接口 SSI$n测量长度 25~5500 mm$n重复精度 ≤ ± 5 µm$n$n$n$n$n$n巴鲁夫BALLUFF位移传感器$n线性偏差d = 1, 2, 3, 7: ± 30µm, d = 4, 5, 6, 8: ± 2 LSB$n工作电压Ub 10~30 VDC$n环境温度 -40...60 °C